Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion

J.A. Sánchez-García, L. Vázquez, R. Gago, O. Plantevin, T.H. Metzger, J. Munoz-Garcia, M. Castro, R. Cuerno

Nanopatterning via ions, photon beam and epitaxy, Sestri Levante (Italy). 23-27 Septiembre 2007

Publication date: September 2007.

Citation:
Sánchez-García, J.A., Vázquez, L., Gago, R., Plantevin, O., Metzger, T.H., Munoz-Garcia, J., Castro, M., Cuerno, R., Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion, Nanopatterning via ions, photon beam and epitaxy, Sestri Levante (Italy). 23-27 September 2007.