Go top
Conference paper information

Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion

J.A. Sánchez-García, L. Vázquez, R. Gago, O. Plantevin, T.H. Metzger, J. Munoz-Garcia, M. Castro, R. Cuerno


Nanopatterning via ions, photon beam and epitaxy

Publication date: September 2007.



Citation:
J.A. Sánchez-García, L. Vázquez, R. Gago, O. Plantevin, T.H. Metzger, J. Munoz-Garcia, M. Castro, R. Cuerno, Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion, Nanopatterning via ions, photon beam and epitaxy. Sestri Levante, Italy, 23-27 September 2007


    Research topics: