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Plasma distributions observed in a 2.45 GHz hydrogen discharge

O.D. Cortázar, A. Megia-Macías, O. Tarvainen, A. Vizcaíno-de-Julián

Plasma Sources Science and Technology Vol. 23, nº. 6, pp. 065028-1 - 065028-12

Summary:

The existence of various spatial distributions of hydrogen plasma in a pulsed 2.45 GHz microwave discharge is demonstrated. The data has been obtained through optical emission diagnostics utilizing an ultra-fast CCD camera system with multi-channel plate (MCP) intensifiers, and a wavelength-filtered photodiode recording temporal light emission signals of hydrogen atoms and molecules. It has been observed that the magnetic field topology and strength are determining the transitions between different plasma patterns and spectral saturation times while neutral gas pressure and microwave power show a weaker influence on the profiles but affect the emitted light intensity.


JCR Impact Factor and WoS quartile: 3,591 - Q1 (2014); 3,800 - Q1 (2022)

DOI reference: DOI icon https://doi.org/10.1088/0963-0252/23/6/065028

Published on paper: December 2014.

Published on-line: October 2014.



Citation:
O.D. Cortázar, A. Megia-Macías, O. Tarvainen, A. Vizcaíno-de-Julián Plasma distributions observed in a 2.45 GHz hydrogen discharge. Plasma Sources Science and Technology. Vol. 23, nº. 6, pp. 065028-1 - 065028-12, December 2014. [Online: October 2014]


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