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Conference paper information

Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion

J.A. Sánchez-García, L. Vázquez, R. Gago, O. Plantevin, T.H. Metzger, J. Muñoz-Garcia, M. Castro, R. Cuerno

Workshop on Nanopatterning via ions, photon beam and epitaxy, Sestri Levante (Italy). 23-27 September 2007


Publication date: 23-Sep-2007.


Citation:
J.A. Sánchez-García, L. Vázquez, R. Gago, O. Plantevin, T.H. Metzger, J. Muñoz-Garcia, M. Castro, R. Cuerno, "Influence of sputtering rate on nanopatterning of crystalline silicon surfaces by low-energy ion beam erosion", presented at Workshop on Nanopatterning via ions, photon beam and epitaxy, Sestri Levante, Italy, 23-27 September 2007

    Research groups:
  • Instituto de Investigación Tecnológica (IIT)