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Conference paper information

Surface nanodot patterning of amorphous silicon films by low-energy ion beam sputtering

A. Redondo-Cubero, J.A. Sánchez-García, R. Gago, L. Vázquez, J. Muñoz-Garcia, M. Castro, R. Cuerno

Workshop on Nanopatterning via ions, photon beam and epitaxy, Sestri Levante (Italy). 23-27 September 2007


Publication date: 23-Sep-2007.


Citation:
A. Redondo-Cubero, J.A. Sánchez-García, R. Gago, L. Vázquez, J. Muñoz-Garcia, M. Castro, R. Cuerno, "Surface nanodot patterning of amorphous silicon films by low-energy ion beam sputtering", presented at Workshop on Nanopatterning via ions, photon beam and epitaxy, Sestri Levante, Italy, 23-27 September 2007

    Research groups:
  • Instituto de Investigación Tecnológica (IIT)