Conference paper information

Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon

A. Moreno Barrado, M. Castro

International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 May 2013

Publication date: 26-May-2013.

Citation:
A. Moreno Barrado, M. Castro, "Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon", presented at International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen, Denmark, 26-30 May 2013

Research topics:

*Mechanical Systems: Structural mechanics, Machinery components, Fast prototyping, Metrology

Research groups:

Instituto de Investigación Tecnológica (IIT)

IIT-13-051A

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