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Conference paper information

Cumulative stress by ion implantation of Xe+. Si: A Molecular Dynamics approach

A. Moreno Barrado, M. Castro

19th International Conference on Ion Implantation Technology - IIIT, Valladolid (Spain). 25-29 June 2012


Publication date: 25-Jun-2012.


Citation:
A. Moreno Barrado, M. Castro, "Cumulative stress by ion implantation of Xe+. Si: A Molecular Dynamics approach", presented at 19th International Conference on Ion Implantation Technology - IIIT, Valladolid, Spain, 25-29 June 2012

    Research topics:
  • *Mechanical Systems: Structural mechanics, Machinery components, Fast prototyping, Metrology
    Research groups:
  • Instituto de Investigación Tecnológica (IIT)

IIT-12-218C_poster