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Review of spatial distribution modes in a 2.45-GHz hydrogen plasma

A. Megia-Macías, O.D. Cortázar

IEEE Transactions on Plasma Science Vol. 47, nº. 1, pp. 483 - 487


A comprehensive review of plasma distributions modes found by us in a 2.45-GHz hydrogen ECR discharge is presented for the first time. Regular and ultrafast photographs show very interesting spatial plasma shape modes never observed before for this kind of plasmas. The resonance of the discharge chamber is kept by using an optical transparent but microwave shielded quartz window with two tungsten meshes, one on each side. The experiments reveal a strong dependence of the plasma distributions on the magnetic field where the plasma is embedded. Most distributions are steady but two of them show a rotational behavior connected with E × B drift.

Palabras Clave: E × B, ECR plasma source, hydrogen, ion source, rotational plasmas, ultrafast photography.

Índice de impacto JCR y cuartil WoS: 1.309 - Q3 (2019); 1.222 - Q4 (2020)

Referencia DOI: DOI icon 10.1109/TPS.2018.2877604

Publicado en papel: Enero 2019.

Publicado on-line: Noviembre 2018.

A. Megia-Macías, O.D. Cortázar. Review of spatial distribution modes in a 2.45-GHz hydrogen plasma. IEEE Transactions on Plasma Science. Vol. 47, nº. 1, pp. 483 - 487, Enero 2019. [Online: Noviembre 2018]

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