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Información del artículo

Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge

O.D. Cortázar, J. Komppula, O. Tarvainen, A. Megia-Macías, A. Vizcaíno-de-Julián, H. Koivisto

Plasma Sources Science and Technology Vol. 22, nº. 1, pp. 015026-1 - 015026-9

Resumen:

Temporal evolution of microwave-plasma coupling, vacuum ultraviolet (VUV) light emission and plasma electron temperature and density is reported for a 2.45 GHz microwave hydrogen discharge pulsed at 50 Hz. Directional couplers, a VUV spectrometer and a Langmuir probe are used for the diagnostics of the plasma breakdown. A 5–10 µs transient peak of light emission exceeding the steady-state intensity by a factor of 3.3 is observed in coincidence with an abrupt drop in the microwave electric field. Observed light emission intensities combined with cross section data indicate that the electron temperature during the breakdown transient exceeds the steady-state value of 4–6 eV by a factor ⩾3, which is in good agreement with the Langmuir probe data. The estimated magnitude of the electron temperature transient corresponds well with the microwave-plasma coupling characteristics, indicating a drop of 30–40% in the electric field strength due to plasma damping.


Índice de impacto JCR y cuartil WoS: 3.056 - Q1 (2013); 3.584 - Q1 (2020)

Referencia DOI: DOI icon 10.1088/0963-0252/22/1/015026

Publicado en papel: Febrero 2013.

Publicado on-line: Febrero 2013.



Cita:
O.D. Cortázar, J. Komppula, O. Tarvainen, A. Megia-Macías, A. Vizcaíno-de-Julián, H. Koivisto. Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge. Plasma Sources Science and Technology. Vol. 22, nº. 1, pp. 015026-1 - 015026-9, Febrero 2013. [Online: Febrero 2013]


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