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Conference paper information

Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon

A. Moreno Barrado, M. Castro

International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26 May 2013


Publication date: May 2013.



Citation:
A. Moreno Barrado, M. Castro, Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon, International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 May 2013.


    Research topics:
  • *Mechanical systems: Structural mechanics, Machinery components, Fast prototyping, Metrology

IIT-13-051A