Conference paper information

Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon

A. Moreno Barrado, M. Castro

International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 Mayo 2013

Publication date: May 2013.

Citation:
Moreno Barrado, A., Castro, M., Molecular dynamics of ion beam implantation of xenon, argon and silicon in crystalline silicon, International Symposium on Nanoscale Pattern Formation at Surfaces, Copenhagen (Denmark). 26-30 May 2013.

Research topics

*Mechanical systems: Structural mechanics, Machinery components, Fast prototyping, Metrology

IIT-13-051A

We use our own and third-party cookies to improve the functionality of our website and the quality of our service, by analyzing your browsing habits.
For more information about cookies and how to refuse them, please visit our Cookies Policy.

I accept this site's cookies.